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Specification
The Magnetic filtering ion plating system
is successfully inverted by our company. With the advanced
plasm plating technology, called as FAD. Compared with PVD &
CVD , as its rate of ionization of the deposited particles
after the magnetic filtering reaches 100 % & it leaves no
large particle, the film shaped by FAD is very dense & smooth.
Whar's more, it can firmly combine with the work piece with
excellent corrosion - proof performance PVD, CVD & FAD
comparison.
|
TYPE |
PVD |
CVD |
FAD |
| Film Type |
Atom |
|
Ion |
| Deposite Energy |
˜0.1 eV |
˜1 eV |
20*102
eV |
| Binding Force |
Bad |
Good |
Excellent |
| Working Pressure |
10-3
Torr |
10-3
Torr |
>10-3
Torr |
| Film Density |
Bad |
Good |
Excellent |
| Deposition Speed |
High |
Intermediate |
High |
| Deposition Size |
Large |
Small |
Large |
| Deposition Temperature |
-120°C |
>200°C |
10-999°C |
Applications
It can be used for plating various high-quality, dense, smooth
and ultra-hard films, including various singular metal films
(such as Cr, Ni, Zr, Ti etc), carbon compounds( such as WC,
TiC etc), oxygen compounds( Al2O3, TaO, ZnO etc), nitrogen
compounds (TiN, AlN, etc) and DLC film (also called Ta-C).
Besides, the system can be equipped with multiple magnetic
filtering arc sources, so it can be used for plating special
multi-layer film and compound film. What,s more , as we have
the beam integrator, we have the ability to make the film at
nanometer level to get a multi-layer nanofilm.
As the film can combine with the work piece firmly, it can be
widely used for various decorative plating (Ti film),
protective plating( DLC film) on the glasses lens, mobile
plate, Watch plate, and hard disc etc and work mold plating (
TiN film and DLC film ) etc to meet the anti- abrasive and
corrosion-proof requirements with beautiful appearance. |