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600F 700F 800F 900F 1000F 1200F
The system is equipped with a touch screen & PLC device, a
computerized automatic gear-shifting vacuum gauge, a three flow
controller, a covariant bias power, four side-installed
heating tubes, a PID temperature central device, two sets of
side-installed sputtering targets & two sets of intermediate
frequency power. With its advanced intermediate frequency, it
can not only be used for plating various electric films such
as TiN, TiC, ZrC, CrN, Ti, Ni, Cr, Cu, Au & Ag etc. but also
can be used for plating SiO2. |
